Resin composition for underlayer film formation, layered product, method for forming pattern, imprint forming kit and process for producing device
申请人:FUJIFILM Corporation
公开号:US10191375B2
公开(公告)日:2019-01-29
Provided are a resin composition for underlayer film formation with which a variation hardly occurs in the line width distribution after processing due to a small thickness of a residual film after mold pressing, a layered product, a method for forming a pattern, an imprint forming kit, and a process for producing a device.
A resin composition for underlayer film formation includes a resin having a group represented by General Formula (A) and at least one group selected from a group represented by General Formula (B), an oxiranyl group and an oxetanyl group, a nonionic surfactant and a solvent. Ra1 represents a hydrogen atom or a methyl group, Rb1 and Rb2 each independently represent a group selected from an unsubstituted linear or branched alkyl group having 1 to 20 carbon atoms and an unsubstituted cycloalkyl group having 3 to 20 carbon atoms, Rb3 represents a group selected from an unsubstituted linear or branched alkyl group having 2 to 20 carbon atoms and an unsubstituted cycloalkyl group having 3 to 20 carbon atoms, and Rb2 and Rb3 may be bonded to each other to form a ring.
本发明提供了一种用于底层成膜的树脂组合物、一种分层产品、一种形成图案的方法、一种压印形成套件和一种生产设备的工艺。
用于形成底层膜的树脂组合物包括具有通式(A)代表的基团和至少一个选自通式(B)代表的基团、环氧乙烷基团和氧杂环丁烷基团的基团的树脂、非离子表面活性剂和溶剂。Ra1 代表氢原子或甲基,Rb1 和 Rb2 各自独立地代表选自具有 1 至 20 个碳原子的未取代的直链或支链烷基和具有 3 至 20 个碳原子的未取代的环烷基的基团,Rb3 代表选自具有 2 至 20 个碳原子的未取代的直链或支链烷基和具有 3 至 20 个碳原子的未取代的环烷基的基团,Rb2 和 Rb3 可相互键合形成环。