ANTIREFLECTIVE COATING COMPOSITION AND PROCESS THEREOF
申请人:Rahman M. Dalil
公开号:US20120251943A1
公开(公告)日:2012-10-04
The invention relates to an antireflective coating composition comprising a crosslinker and a crosslinkable polymer capable of being crosslinked by the crosslinker, where the crosslinkable polymer comprises a unit represented by structure (1):
A-B—C (1)
where A is a fused aromatic ring, B has a structure (2), and C is a hydroxybiphenyl of structure (3)
where R
1
is C
1
-C
4
alkyl and R
2
is C
1
-C
4
alkyl.
The invention further relates to a process for forming an image using the composition.
PROCESS OF COATING A HARD MASK COMPOSITION FOR PATTERN TRANSFER INTO A SILICON SUBSTRATE
申请人:Merck Patent GmbH
公开号:EP3686672A1
公开(公告)日:2020-07-29
The present invention relates to a process of coating a hard mask composition on a silicon substrate comprising:
a4) applying a composition comprised of metal oxide nanoparticles dispersed in an organic solvent onto a substrate to form a hard mask film,
b4) baking the hard mask film,
c4) coating a bottom antireflective coating on top of the hard mask film,
d4) coating a photoresist on top of said antireflective coating,
e4) patterning the resist forming a resist pattern,
f4) etching through the bottom antireflective coating not protected by the resist pattern down to the hard mask coating with a fluorinated plasma,
g4) etching through the hard mask layer not protected by the bottom antireflective coating and photoresist down to the silicon substrate with a chlorine plasma producing a patterned hard mask film, and
h4) etching with a fluorinated plasma into the silicon substrate in those area not protected by the patterned hard mask film producing topographical features into the silicon features.