申请人:MASUYAMA Tatsuro
公开号:US20130040237A1
公开(公告)日:2013-02-14
A photoresist composition which comprises
a salt represented by formula (I):
wherein Q
1
and Q
2
each independently represent a fluorine atom or a C1-C6 perfluoroalkyl group,
R
1
, R
2
and R
3
each independently represent a hydrogen atom or a C1-C10 monovalent aliphatic saturated hydrocarbon group,
X
1
and X
2
each independently represent a single bond, a carbonyl group, or a C1-C10 divalent aliphatic saturated hydrocarbon group where a hydrogen atom can be replaced by a hydroxy group and where a methylene group can be replaced by an oxygen atom, a sulfonyl group or a carbonyl group,
A
1
represents a C1-C30 organic group,
m1 represents an integer of 1 to 4, and
Z
+
represents an organic cation, and
a resin which is hardly soluble or insoluble but soluble in an aqueous alkali solution by action of an acid.
一种光阻剂组合物,包括由式(I)表示的盐:其中Q1和Q2分别独立表示氟原子或C1-C6全氟烷基基团,R1、R2和R3分别独立表示氢原子或C1-C10一价脂肪饱和碳氢基团,X1和X2分别独立表示单键、羰基或C1-C10双价脂肪饱和碳氢基团,其中氢原子可以被羟基取代,亚甲基基团可以被氧原子、磺酰基或羰基取代,A1表示C1-C30有机基,m1表示1到4的整数,Z+表示有机阳离子,以及一种树脂,该树脂在酸的作用下几乎不溶或不溶,但在水性碱溶液中可溶。