Silicon substrates having Si—H bonds are chemically modified using a fluorinated olefin having the formula:
1
wherein
m is an integer greater than or equal to 1;
n is an integer greater than or equal to 0;
Z is a divalent linking group; and
R
f
is a highly fluorinated organic group.
具有Si-H键的
硅衬底通过使用具有以下公式的
氟代烯烃进行
化学修饰:1其中m是大于或等于1的整数;n是大于或等于0的整数;Z是二价连接基团;Rf是高度
氟化的有机基团。