New acyl(allyl)- and acyl(vinyl)silanes have been synthesized in order to explore cross metathesis or ring-closing metathesis as a new way towards bis(acyl)silanes or unsaturated cyclic acylsilanes, respectively. Metathesis from acylsilanes did not work but their precursors, in particular in benzotriazol series, proved to be good candidates. Two new benzotriazolyl substituted silacyclic compounds (tetrahydrosiline