申请人:Shipley Company, L.L.C.
公开号:US20040131862A1
公开(公告)日:2004-07-08
Disclosed herein is a process of forming a ferroelectric polymer film from a solution, wherein the solvent composition is selected so as to adjust the properties of the film. Films formed by this method have improved properties, particularly with respect to roughness and crystal domain size.
本文公开了一种从溶液中形成铁电聚合物薄膜的工艺,其中溶剂成分的选择可调整薄膜的特性。用这种方法形成的薄膜具有更好的性能,特别是在粗糙度和晶域尺寸方面。