SULFONIUM SALT, RESIST COMPOSITION AND RESIST PATTERN FORMING PROCESS
申请人:SHIN-ETSU CHEMICAL CO., LTD.
公开号:US20160090355A1
公开(公告)日:2016-03-31
A sulfonium salt of formula (0-1) is provided wherein W is alkylene or arylene, R
01
is a monovalent hydrocarbon group, m is 0, 1 or 2, k is an integer: 0≦k≦5+4m, R
101
, R
102
and R
103
are a monovalent hydrocarbon group, or at least two of R
101
, R
102
and R
103
may bond together to form a ring with the sulfur atom, and L is a single bond, ester, sulfonic acid ester, carbonate or carbamate bond. A resist composition comprising the sulfonium salt as PAG exhibits a very high resolution when processed by EB and EUV lithography. A pattern with minimal LER is obtainable.
Three-Component Asymmetric Ni-Catalyzed 1,2-Dicarbofunctionalization of Unactivated Alkenes via Stereoselective Migratory Insertion
作者:Omar Apolinar、Taeho Kang、Turki M. Alturaifi、Pranali G. Bedekar、Camille Z. Rubel、Joseph Derosa、Brittany B. Sanchez、Quynh Nguyen Wong、Emily J. Sturgell、Jason S. Chen、Steven R. Wisniewski、Peng Liu、Keary M. Engle
DOI:10.1021/jacs.2c06636
日期:2022.10.26
asymmetric 1,2-dicarbofunctionalization of unactivated alkenes with aryl iodides and aryl/alkenylboronic esters under nickel/bioxazoline catalysis is disclosed. A wide array of aryl and alkenyl nucleophiles are tolerated, furnishing the products in good yield and with high enantioselectivity. In addition to terminal alkenes, 1,2-disubstituted internal alkenes participate in the reaction, establishing two contiguous
Re-Evaluation of P-Chiral, N-Phosphoryl Sulfonamide Brønsted Acids in the Asymmetric Synthesis of 1,2,3,4-Tetrahydroquinoline-2-Carboxylate Esters via Biomimetic Transfer Hydrogenation
作者:Ifenna I Mbaezue、Filip Topic、Youla S Tsantrizos
DOI:10.1055/a-2047-8301
日期:——
Enantioenriched heterocyclic and rigidified bioisosteres of aminoacids are valuable building blocks in drug discovery, particularly in the design of peptidomimetic drugs. The rigidified bioisostere of phenylalanine, 1,2,3,4-tetrahydroquinoline-2-carboxylic acid, is found in several biologically active compounds. However, only a small number of successful methodologies have been reported for its asymmetric
氨基酸的对映体富集杂环和刚性生物电子等排物是药物发现的重要组成部分,特别是在拟肽药物的设计中。苯丙氨酸的刚性生物电子等排物 1,2,3,4-四氢喹啉-2-羧酸存在于多种生物活性化合物中。然而,只有少数成功的方法被报道用于其不对称合成。为了开发一种环境友好且无金属的有机催化工艺来制备该化合物,合成了许多新型P-手性N-磷酰基磺酰胺布朗斯台德酸,并在喹啉-2-羧酸盐的仿生转移氢化反应中进行了评估,得到( R )-1,2,3,4-四氢喹啉-2-羧酸盐。
ONIUM SALT, NEGATIVE RESIST COMPOSITION, AND RESIST PATTERN FORMING PROCESS
申请人:Shin-Etsu Chemical Co., Ltd.
公开号:EP3644122A1
公开(公告)日:2020-04-29
A negative resist composition comprising an onium salt having formula (A) and a base polymer is provided. The resist composition exhibits a high resolution during pattern formation and forms a pattern with minimal LER.