申请人:Bell Telephone Laboratories, Incorporated
公开号:US04396704A1
公开(公告)日:1983-08-02
Solid state devices are produced by dry etching of a resist film to produce a negative resist pattern. The film comprises a polymer typically containing a halogen, and at least one type of silicon-containing or nonsilicon-containing organometallic monomer. The radiation, typically X-ray radiation, locks the monomer or monomers into the polymer, with a subsequent fixing step removing the unlocked monomer or monomers in the unirradiated portion of the resist. The film is then exposed to a plasma comprising oxygen, which removes the unirradiated portion at a faster rate than the radiated portion, producing a negative resist pattern. The plasma development is typically accomplished by reactive ion etching. Sensitizers can be used to extend the wavelength response of the films, typically into the ultraviolet or visible regions.
固态器件是通过干法蚀刻抗蚀膜来制造负性抗蚀图案的。该膜包括通常含有卤素的聚合物,以及至少一种含硅或不含硅的有机金属单体。辐射,通常是X射线辐射,将单体或单体锁定到聚合物中,随后的固定步骤将未锁定的单体或单体从抗蚀剂未辐射部分中去除。然后将膜暴露于包含氧气的等离子体中,后者以比辐射部分更快的速度去除未辐射部分,从而产生负性抗蚀图案。等离子体开发通常通过反应性离子刻蚀实现。可以使用增敏剂来扩展膜的波长响应,通常扩展到紫外或可见区域。