Solid state devices are produced by dry etching of a resist film to produce a negative resist pattern. The film comprises a polymer typically containing a halogen, and at least one type of silicon-containing or nonsilicon-containing organometallic monomer. The radiation, typically X-ray radiation, locks the monomer or monomers into the polymer, with a subsequent fixing step removing the unlocked monomer or monomers in the unirradiated portion of the resist. The film is then exposed to a plasma comprising oxygen, which removes the unirradiated portion at a faster rate than the radiated portion, producing a negative resist pattern. The plasma development is typically accomplished by reactive ion etching. Sensitizers can be used to extend the wavelength response of the films, typically into the ultraviolet or visible regions.
固态器件是通过干法蚀刻抗蚀膜以产生负抗蚀图案来制造的。该膜包括一种聚合物,通常含有卤素,以及至少一种含
硅或不含
硅的有机
金属单体。辐射,通常是X射线辐射,将单体或单体锁定到聚合物中,随后通过固定步骤除去未锁定的单体或单体在抗蚀剂未照射部分中。然后将膜暴露于包含
氧气的等离子体中,该等离子体以比辐射部分更快的速度去除未辐射的部分,从而产生负抗蚀图案。等离子体开发通常通过反应离子刻蚀完成。可以使用增敏剂将膜的波长响应扩展到紫外线或可见光区域。