申请人:Yamato Hitoshi
公开号:US20100167178A1
公开(公告)日:2010-07-01
Compounds of the formula (I), (II) or (III), wherein R
1
is for example C
1
-C
18
alkylsulfonyl, C
1
-C
10
haloalkylsulfonyl, camphorylsulfonyl, phenyl-C
1
-C
3
alkylsulfonyl, phenylsulfonyl, naphthylsulfonyl, anthrylsulfonyl, phenanthrylsulfonyl or heteroarylsulfonyl, R′
1
is for example phenylenedisulfonyl, R
2
is for example CN, C
1
-C
10
haloalkyl or C
1
-C
10
haloalkyl which is substituted by (IV); Ar
1
is for example phenyl optionally substituted by a group of formula (IV); Ar′
1
is for example phenylene which optionally is substituted by a group of formula (IV); A
1
, A
2
and A
3
independently of each other are for example hydrogen, halogen, CN, or C
1
-C
18
alkyl; D
2
is for example a direct bond, O, (CO)O, (CO)S, SO
2
, OSO
2
or C
1
-C
18
alkylene; or A
3
and D
2
together form C
3
-C
30
cycloalkenyl; or A
2
and D
2
together with the carbon of the ethylenically unsaturated double bond to which they are attached form C
3
-C
30
cycloalkyl; D
3
and D
4
for example independently of each other are a direct bond, O, S, C
1
-C
18
alkylene or C
3
-C
30
cycloalkylene provided that at least one of the radicals R
2
, Ar
1
or Ar′
1
comprises a group of the formula (IV); are suitable as photolatent acid donors and for the preparation of corresponding polymers to be employed in chemically amplified photoresists.
化合物的公式为(I),(II)或(III),其中R1例如为C1-C18烷基磺酰基,C1-C10卤代烷基磺酰基,樟脑磺酰基,苯基-C1-C3烷基磺酰基,苯基磺酰基,萘基磺酰基,蒽基磺酰基,菲磺酰基或杂环芳基磺酰基,R'1例如为苯基二磺酰基,R2例如为CN,C1-C10卤代烷基或被(IV)取代的C1-C10卤代烷基;Ar1例如为苯基,可选地被公式(IV)的基团取代;Ar'1例如为苯基,可选地被公式(IV)的基团取代;A1,A2和A3独立地例如为氢,卤素,CN或C1-C18烷基;D2例如为直接键,O,(CO)O,(CO)S,SO2,OSO2或C1-C18烷基;或A3和D2一起形成C3-C30环烯基;或A2和D2与它们所附着的乙烯基双键的碳一起形成C3-C30环烷基;D3和D4例如独立地为直接键,O,S,C1-C18烷基或C3-C30环烷基,至少其中之一的基团R2,Ar1或Ar'1包含公式(IV)的基团,适用作光激发酸给体,并用于制备相应的聚合物,以用于化学增强型光刻胶。