申请人:Air Products and Chemicals, Inc.
公开号:US08313807B2
公开(公告)日:2012-11-20
The present invention is directed to high coordination sphere Group 2 metal β-diketiminate compositions, such as bis(N-(2,2-methoxyethyl)-4-(2,2-methoxyethylimino)-2-penten-2-aminato) barium; and the deposition of the metals of such metal ligand compositions by chemical vapor deposition, pulsed chemical vapor deposition, molecular layer deposition or atomic layer deposition to produce Group 2 metal containing films, such as barium strontium titanate films or strontium titanate films or barium doped lanthanate as high k materials for electronic device manufacturing.
本发明涉及高配位球Group 2金属β-二酮亚胺配合物,例如双(N-(2,2-甲氧基乙基)-4-(2,2-甲氧基乙基亚胺)-2-戊烯-2-氨基)钡;以及通过化学气相沉积、脉冲化学气相沉积、分子层沉积或原子层沉积沉积这种金属配体组成物的金属以产生Group 2金属含量的薄膜,例如钡钛酸锶薄膜或钛酸锶薄膜或掺钡镧高k材料用于电子器件制造。