An abrasive liquid for a metal comprising (1) an oxidizing agent for a metal, (2) a dissolving agent for an oxidized metal, (3) a first protecting film-forming agent such as an amino acid or an azole which adsorbs physically on the surface of the metal and/or forms a chemical bond, to thereby form a protecting film, (4) a second protecting film-forming agent such as polyacrylic acid, polyamido acid or a salt thereof which assists the first protecting film-forming agent informing a protecting film and (5) water; and a method for polishing.
一种用于
金属的研磨液,包括:(1)
金属的氧化剂;(2)
氧化金属的溶解剂;(3) 第一保护成膜剂,如
氨基酸或唑,其物理吸附在
金属表面和/或形成
化学键,从而形成保护膜;(4) 第二保护成膜剂,如聚
丙烯酸、聚酰胺酸或其盐,其协助第一保护成膜剂形成保护膜;(5)
水;以及抛光方法。