spectroscopy, and model reactions with calix[4]arene as a mimic for an oxosurface were used to clarify the chemical nature of surface-bonded silyl groups. The trisilylamines exhibited a comparatively slow surface reaction, which allowed for the adjustment of the amount of silylated and nonreacted SiOH groups and led to a stoichiometric distribution of surface functionalities. The 2:1 integral ratio of