There is formed a laminated resist which exhibits sufficient reflection reducing effect in a photolithography process using light of vacuum ultraviolet region and also has sufficient developing characteristics in a developing process. The method of forming the laminated photoresist comprises (I) a step for forming the photoresist layer (L1) on a substrate and (II) a step for forming the antireflection layer (L2) on the photoresist layer (L1) by applying the coating composition containing the fluorine-containing polymer (A) having hydrophilic group Y. The fluorine-containing polymer (A) contains a structural unit derived from a fluorine-containing ethylenic monomer having hydrophilic group Y and is characterized in that (i) the hydrophilic group Y contains an acidic OH group having a pKa value of not more than 11, (ii) a fluorine content is not less than 50 % by mass, and (iii) the number of moles of the hydrophilic group Y in 100 g of the fluorine-containing polymer (A) is not less than 0.14.
形成了一种层状光刻胶,它在使用真空紫外区光的光刻工艺中显示出足够的减反射效果,并且在显影工艺中具有足够的显影特性。形成层状光刻胶的方法包括:(I) 在基底上形成光刻胶层 (L1) 的步骤;(II) 在光刻胶层 (L1) 上形成抗反射层 (L2) 的步骤,该步骤通过涂敷含有亲水基团 Y 的含氟聚合物 (A) 的涂层组合物来实现。含氟聚合物(A)含有由具有亲水基团 Y 的含氟乙烯单体衍生的结构单元,其特征在于:(i) 亲水基团 Y 含有 pKa 值不大于 11 的酸性 OH 基团;(ii) 氟含量不小于 50%(按质量计);(iii) 100 克含氟聚合物(A)中亲水基团 Y 的摩尔数不小于 0.14。
Polyfluoroalkanoic compounds and their preparation
There is formed a laminated resist which exhibits sufficient reflection reducing effect in a photolithography process using light of vacuum ultraviolet region and also has sufficient developing characteristics in a developing process. The method of forming the laminated photoresist comprises (I) a step for forming the photoresist layer (L
1
) on a substrate and (II) a step for forming the antireflection layer (L
2
) on the photoresist layer (L
1
) by applying the coating composition containing the fluorine-containing polymer (A) having hydrophilic group Y. The fluorine-containing polymer (A) contains a structural unit derived from a fluorine-containing ethylenic monomer having hydrophilic group Y and is characterized in that (i) the hydrophilic group Y contains an acidic OH group having a pKa value of not more than 11, (ii) a fluorine content is not less than 50% by mass, and (iii) the number of moles of the hydrophilic group Y in 100 g of the fluorine-containing polymer (A) is not less than 0.14.