申请人:Hagiwara Yuji
公开号:US20110207954A1
公开(公告)日:2011-08-25
In the present invention, a target alkoxycarbonylfluoroalkanesulfonic acid salt is obtained by using a halofluoroalkanoic acid ester as a starting raw material, sulfinating the halofluoroalkanoic acid ester in the presence of an amine (as a first step), and then, oxidizing the resulting sulfination product (as a second step). Further, an alkoxycarbonylfluoroalkanesulfinic acid onium salt, which is useful as a photoacid generator, is obtained by salt exchange reaction of the alkoxycarbonylfluoroalkanesulfonic acid salt.
在本发明中,通过使用卤代氟烷羧酸酯作为起始原料,首先在胺的存在下对卤代氟烷羧酸酯进行磺化(作为第一步),然后氧化所得的磺化产物(作为第二步),获得目标烷氧羰基氟烷磺酸盐。此外,通过对烷氧羰基氟烷磺酸盐进行盐交换反应,得到一种用作光酸发生剂的烷氧羰基氟烷磺酸亚磺酸盐。