In the present invention, a target alkoxycarbonylfluoroalkanesulfonic acid salt is obtained by using a halofluoroalkanoic acid ester as a starting raw material, sulfinating the halofluoroalkanoic acid ester in the presence of an amine (as a first step), and then, oxidizing the resulting sulfination product (as a second step). Further, an alkoxycarbonylfluoroalkanesulfinic acid onium salt, which is useful as a photoacid generator, is obtained by salt exchange reaction of the alkoxycarbonylfluoroalkanesulfonic acid salt.
在本发明中,使用卤代氟烷
羧酸酯作为起始原料,通过在胺的存在下进行亚磺酰化反应(作为第一步),然后氧化所得的亚磺酰化产物(作为第二步),以获得目标
羧酸酯氟烷
磺酸盐。此外,通过盐交换反应获得了一种用作光酸发生剂的
羧酸酯氟烷亚
磺酸盐离子。