Polymerizable anion-containing sulfonium salt and polymer, resist composition, and patterning process
申请人:Shin-Etsu Chemical Co., Ltd.
公开号:US08057985B2
公开(公告)日:2011-11-15
A polymerizable anion-containing sulfonium salt having formula (1) is provided wherein R1 is H, F, methyl or trifluoromethyl, R2, R3 and R4 are C1-C10 alkyl, alkenyl or oxoalkyl or C6-C18 aryl, aralkyl or aryloxoalkyl, or two of R2, R3 and R4 may bond together to form a ring with S, A is a C1-C20 organic group, and n is 0 or 1. The sulfonium salt generates a very strong sulfonic acid upon exposure to high-energy radiation. A resist composition comprising a polymer derived from the sulfonium salt is also provided.
提供了一种具有公式(1)的可聚合阴离子含硫鎓盐,其中R1为H、F、甲基或三氟甲基,R2、R3和R4为C1-C10烷基、烯基或氧代烷基或C6-C18芳基、芳基烷基或芳基氧代烷基,或者R2、R3和R4中的两个可以结合在一起形成一个环,其中S,A为C1-C20有机基团,n为0或1。该硫鎓盐在高能辐射下产生非常强的磺酸。还提供了一种包含从硫鎓盐衍生的聚合物的抗蚀剂组合物。