申请人:Rohm and Haas Electronic Materials LLC
公开号:US20130078569A1
公开(公告)日:2013-03-28
A molecular glass compound comprises a vinyl ether adduct of an aromatic vinyl ether of formula C(R
1
)
2
═C(R
2
)—O-(L)
n
-Ar
1
, and a calix[4]arene, wherein R
1
and R
2
are each independently a single bond, H, C
1-20
alkyl, C
1-20
haloalkyl, C
6-20
aryl, C
6-20
haloaryl, C
7-20
aralkyl, or C
7-20
haloaralkyl, L is a C
1-20
linking group, n is 0 or 1, and Ar
1
is a halo-containing monocyclic, or substituted or unsubstituted polycyclic or fused polycyclic C
6-20
aromatic-containing moiety, wherein R
1
and R
2
are connected to Ar
1
when either or both of R
1
and R
2
is a single bond and n is 0. A photoresist, comprising the molecular glass compound, a solvent, and a photoacid generator, a coated substrate, comprising (a) a substrate having one or more layers to be patterned on a surface thereof; and (b) a layer of a photoresist composition over the one or more layers to be patterned, and a method of forming the molecular glass compound, are also disclosed.
一种分子玻璃化合物包括芳香基乙烯醚的乙烯醚加合物,化学式为C(R1)2═C(R2)—O-(L)n-Ar1,以及一种杯芳烃[4],其中R1和R2分别独立为单键,H,C1-20烷基,C1-20卤代烷基,C6-20芳基,C6-20卤代芳基,C7-20芳基烷基,或C7-20卤代芳基烷基,L是C1-20连接基,n为0或1,Ar1是含卤素的单环芳基,或取代或未取代的多环或融合多环C6-20芳基结构,当R1和R2中的一个或两个为单键且n为0时,R1和R2与Ar1相连。此外,还公开了包括该分子玻璃化合物、溶剂和光酸发生剂的光阻剂,包括(a)具有一个或多个要在其表面上进行图案化的层的基板;和(b)覆盖在要进行图案化的一个或多个层上的光阻剂组合物层,以及形成该分子玻璃化合物的方法。