A radiation-sensitive resin composition includes: a first polymer having a first structural unit that includes an acid-labile group; a radiation-sensitive acid generator; and a first compound capable of forming a salt through a structural change in a molecule thereof upon irradiation with a radioactive ray. Basicity of the first compound preferably changes upon irradiation with a radioactive ray. The first compound preferably generates an acid upon irradiation with a radioactive ray. The first compound is preferably represented by formula (1). In formula (1), Ar1 represents a substituted or unsubstituted heteroarenediyl group having 4 to 30 ring atoms and having at least one nitrogen atom as a ring-constituting atom.
一种辐射敏感性
树脂组合物包括:第一种聚合物,其第一结构单元包括一个耐酸基团;一种辐射敏感性酸发生器;以及第一种化合物,在放射性射线辐照下,其分子结构发生变化,从而能够形成盐。第一种化合物的碱性最好在放射性射线照射时发生变化。第一种化合物在接受放射性射线辐照时最好生成一种酸。第一种化合物最好用式(1)表示。式(1)中,Ar1 代表具有 4 至 30 个环原子且至少有一个氮原子作为构环原子的取代或未取代的杂
戊二烯基。