申请人:Rohm and Haas Electronic Materials LLC
公开号:US20140080060A1
公开(公告)日:2014-03-20
Acid generator compounds are provided that are particularly useful as a photoresist composition component. In one preferred aspect, cyclic sulfonium salt and photoresist compositions that comprise such compounds are provided. In another preferred aspect, acid generator compounds are provided that comprise one or more covalently linked acid-labile moieties, particularly ester-containing acid-labile moieties.
提供了一种酸生成化合物,特别适用于作为光阻组分。在一个首选方面,提供了环状硫鎓盐和包含这种化合物的光阻组合物。在另一个首选方面,提供了酸生成化合物,其中包含一个或多个共价连接的酸不稳定基团,特别是含酯基的酸不稳定基团。