Fluorinated surfactants for aqueous acid etch solutions
申请人:3M Innovative Properties Company
公开号:US20040094510A1
公开(公告)日:2004-05-20
Novel aqueous, acid etch solutions comprising a fluorinated surfactant are provided. The etch solutions are used with a wide variety of substrates, for example, in the etching of silicon oxide-containing substrates.