Novel aqueous, acid etch solutions comprising a fluorinated surfactant are provided. The etch solutions are used with a wide variety of substrates, for example, in the etching of silicon oxide-containing substrates.
提供了一种包含
氟表面活性剂的新型
水性酸蚀溶液。这种酸蚀溶液可用于各种基板,例如,在蚀刻含有
硅氧化物的基板时使用。