[EN] FLUOROALCOHOL CONTAINING MOLECULAR PHOTORESIST MATERIALS AND PROCESSES OF USE [FR] MATÉRIAUX MOLÉCULAIRES DE RÉSINE PHOTOSENSIBLE CONTENANT UN ALCOOL FLUORÉ ET LEURS PROCÉDÉS D'UTILISATION
[EN] FLUOROALCOHOL CONTAINING MOLECULAR PHOTORESIST MATERIALS AND PROCESSES OF USE [FR] MATÉRIAUX MOLÉCULAIRES DE RÉSINE PHOTOSENSIBLE CONTENANT UN ALCOOL FLUORÉ ET LEURS PROCÉDÉS D'UTILISATION
FLUOROALCOHOL CONTAINING MOLECULAR PHOTORESIST MATERIALS AND PROCESSES OF USE
申请人:International Business Machines Corporation
公开号:EP2651865B1
公开(公告)日:2017-07-12
Fluoroalcohol Containing Molecular Photoresist Materials and Processes of Use
申请人:Bozano Luisa D.
公开号:US20120156611A1
公开(公告)日:2012-06-21
Phenolic molecular glasses such as calixarenes include at least one fluoroalcohol containing unit. The fluoroalcohol containing molecular glasses can be used in photoresist compositions. Also disclosed are processes for generating a resist image on a substrate using the photoresist composition.
US8530136B2
申请人:——
公开号:US8530136B2
公开(公告)日:2013-09-10
[EN] FLUOROALCOHOL CONTAINING MOLECULAR PHOTORESIST MATERIALS AND PROCESSES OF USE<br/>[FR] MATÉRIAUX MOLÉCULAIRES DE RÉSINE PHOTOSENSIBLE CONTENANT UN ALCOOL FLUORÉ ET LEURS PROCÉDÉS D'UTILISATION
申请人:IBM
公开号:WO2012079919A1
公开(公告)日:2012-06-21
Phenolic molecular glasses such as calixarenes include at least one fluoroalcohol containing unit. The fluoroalcohol containing molecular glasses can be used in photoresist compositions. Also disclosed are processes for generating a resist image on a substrate using the photoresist composition.