Adamantane compounds and insulating film forming coating solutions
申请人:SUMITOMO CHEMICAL COMPANY, LIMITED
公开号:US20040127715A1
公开(公告)日:2004-07-01
The object of the present invention is to provide a novel compound which can prepare an insulating film having a low dielectric constant and excellent in the heat resistance. This object is achieved by an adamantane compound represented by the formula (1).
1
(wherein B represents a direct bond, an alkylene group having a carbon number of 1 to 6, an alkenylene group having a carbon number of 2 to 6, or an alkynylene group having a carbon number of 2 to 6, and X represents a monovalent organic group represented by the formula (2).
2