申请人:TOKYO OHKA KOGYO CO., LTD.
公开号:US20170371241A1
公开(公告)日:2017-12-28
A resist composition containing a resin component having a structural unit represented by general formula (a0-1), and a compound represented by general formula (b1). In general formula (a0-1), R is a hydrogen atom, an alkyl group, or a halogenated alkyl group. Va
1
is a divalent hydrocarbon group. n
a1
represents an integer of 0 to 2. Ra′
12
and Ra′
13
are a monovalent chain saturated hydrocarbon group having 1 to 10 carbon atoms or a hydrogen atom. Ra′
14
is a phenyl group, a naphthyl group, or an anthryl group. In general formula (b1), R
b1
represents a cyclic hydrocarbon group. Y
b1
represents a divalent linking group containing an ester bond. V
b1
represents an alkylene group, a fluorinated alkylene group, or a single bond. m is an integer of 1 or more, and M
m+
is an m-valent organic cation.
一种电阻组分,包含具有一般式(a0-1)所代表的结构单元的树脂组分,以及一种由一般式(b1)所代表的化合物。在一般式(a0-1)中,R是氢原子、烷基或卤代烷基。Va1是双价碳氢基团。na1表示0至2的整数。Ra′12和Ra′13是具有1至10个碳原子的单价链饱和碳氢基团或氢原子。Ra′14是苯基、萘基或蒽基。在一般式(b1)中,Rb1代表环烃基。Yb1代表含有酯键的双价连接基团。Vb1代表烷基、氟化烷基或单键。m是1或更多的整数,Mm+是m价有机阳离子。