申请人:Hoechst Celanese Corp.
公开号:US05773591A1
公开(公告)日:1998-06-30
A novel process for preparing sulfonic acid esters and amides of benzo-heterocyclic diazo diketo compounds, such as substituted diazo-4-oxo-3,4-dihydrocoumarins, which are useful synthetic intermediates in a wide variety of applications including photoresists, opto-electronics, agricultural, and pharmaceutical applications is disclosed and claimed. The process comprises the steps of (a) subjecting a substituted benzo-heterocyclic .beta.-keto-enol compound to suitable diazo transfer conditions in the presence of a diazo transfer agent; (b) subjecting the so formed diazo diketo compound to suitable halosulfonation conditions in the presence of a halosulfonation agent; and (c) subjecting the so formed halosulfonyl aromatic compound to suitable substitution reaction in the presence of an alcohol or an amine to form the corresponding sulfonic acid ester or amide of benzo-heterocyclic diazo diketo compound. The compounds formed from the process of the present invention exhibit very high photosensitivity in the deep ultraviolet (DUV) region (ca. 250 nm), and therefore, are useful as photoactive compounds in DUV photoresist formulations.
一种用于制备苯并杂环重氮二酮化合物的磺酸酯和酰胺的新型方法被揭示和声明。这些化合物,如取代的重氮-4-氧代-3,4-二氢香豆素,是一种有用的合成中间体,在包括光刻胶、光电子学、农业和制药等各种应用中被使用。该方法包括以下步骤:(a)在存在重氮转移剂的条件下,使取代的苯并杂环β-酮-烯醇化合物经受适当的重氮转移条件;(b)在存在卤磺化剂的条件下,使得到的重氮二酮化合物经受适当的卤磺化条件;以及(c)在存在醇或胺的条件下,使得到的卤磺基芳香化合物经受适当的取代反应,形成相应的苯并杂环重氮二酮化合物的磺酸酯或酰胺。根据本发明的方法形成的化合物在深紫外(DUV)区域(约250纳米)表现出非常高的光敏性,因此,在DUV光刻胶配方中作为光活性化合物是有用的。