Provided is a method for producing fluoromethane and 3,3,3-trifluoro-2-(trifluoromethyl)propanoyl fluoride ((CF
3
)
2
CHCOF), which are useful as dry etching gases etc., safely and inexpensively with high purity.
According to the method in which 1,1,3,3,3-pentafluoro-2-trifluoromethylpropyl methyl ether is pyrolyzed in a gas phase in the presence of a catalyst, the desired fluoromethane and 3,3,3-trifluoro-2-(trifluoromethyl)propanoyl fluoride can be obtained with high selectivity and high conversion of the starting material by a simple process in which a pyrolysis reaction is performed in a gas phase using the inexpensive starting material.
提供了一种生产
氟甲烷和3,3,3-三
氟-2-(三
氟甲基)丙酰
氟 ((
CF3)2CHCOF) 的方法,这些方法可作为干法刻蚀气体等用途,具有高纯度、安全和低成本。根据该方法,在催化剂存在的气相中,通过对1,1,3,3,3-五
氟-2-三
氟甲基丙基
甲醚进行热解,可以通过简单的气相热解反应过程获得所需的
氟甲烷和3,3,3-三
氟-2-(三
氟甲基)丙酰
氟,具有高选择性和高起始物质转化率。