申请人:International Business Machines Corporation
公开号:US07951525B2
公开(公告)日:2011-05-31
Polymers for use in photoresist compositions include a repeat unit having a formula of:
wherein Z represents a repeat unit of a polymer backbone; X is a linking group selected from the group consisting of alkylene, arylene, araalkylene, carbonyl, carboxyl, carboxyalkylene, oxy, oxyalkylene, and combinations thereof, and R is selected from the group consisting of hydrogen, alkyl, aryl, and cycloalkyl groups with the proviso that X and R are not part of the same ring system. Also disclosed are processes for patterning a relief image of the photoresist composition, wherein the photoresist composition has an outgassing rate of less than 6.5E+14 molecules/cm2/s.
用于光阻组成的聚合物包括具有以下公式的重复单元:其中Z表示聚合物主链的重复单元;X是从烷基,芳基,芳基烷基,羰基,羧基,羧基烷基,氧,氧烷基和它们的组合中选择的连接基团,R选择自氢,烷基,芳基和环烷基组成的群体,前提是X和R不是同一环系统的一部分。还公开了用于图案化光阻组成的浮雕图像的过程,其中光阻组成具有小于6.5E+14分子/平方厘米/秒的放气速率。