A positive working resist composition comprising (A1) a resin containing a repeating unit represented by formula (1) defined in the specification and a repeating unit represented by formula (2) defined in the specification and having a property of being insoluble or sparingly soluble in an alkali developing solution and becoming soluble in an alkali developing solution by the action of an acid, and (B) a compound capable of generating sulfonic acid upon irradiation with active rays or radiations in an amount of from 5 to 20% by weight based on the total solid content of the positive working resist composition.
一种正作用型感光胶组合物,包括(A1)一种
树脂,其含有在规范中定义的式(1)所表示的重复单元和在规范中定义的式(2)所表示的重复单元,并具有在碱性显影溶液中不溶或难溶的性质,并通过酸的作用在碱性显影溶液中变为可溶性;以及(B)一种化合物,其能够在活性射线或辐射的照射下产生
磺酸,其占正作用型感光胶组合物的总固体含量的5%至20%的重量。