A radiation-sensitive resin composition comprises a solution of an alkali-soluble resin and a radiation-sensitive compound in a solvent comprising a monooxymonocarboxylic acid ester. This composition has a high storgage stability (i.e., a very small amount of fine particles are formed during storage) and is suited for use as a resist for making integrated circuits.
一种辐射敏感
树脂组合物由一种碱溶性
树脂和一种辐射敏感化合物在一种由单氧一
羧酸酯组成的溶剂中的溶液组成。 这种组合物具有很高的储存稳定性(即在储存过程中形成极少量的细小颗粒),适合用作制造集成电路的抗蚀剂。