申请人:Rohm and Haas Electronic Materials Korea Ltd.
公开号:US20180059545A1
公开(公告)日:2018-03-01
In one preferred embodiment, polymers are provided that comprise a structure of the following Formula (I):
Photoresists that comprises such polymers also are provided.
在一个首选实施例中,提供了包含以下化学式(I)结构的聚合物:
还提供了包含这种聚合物的光刻胶。