A radiation-sensitive resin composition includes (A) an acid-labile group-containing resin, and (C) a compound shown by the following general formula (i).
wherein R1 represents a hydrogen atom or the like, R2 represents a single bond or the like, R3 represents a linear monovalent hydrocarbon group having 1 to 10 carbon atoms in which some or all of the hydrogen atoms may be substituted with a fluorine atom, or the like, and X+ represents an onium cation.
辐射敏感
树脂组合物包括 (A) 含酸基团的
树脂和 (C) 下式通式(i)所示的化合物。
其中 R1 代表氢原子或类似物,R2 代表单键或类似物,R3 代表具有 1 至 10 个碳原子的线性单价烃基,其中部分或全部氢原子可被
氟原子或类似物取代,X+ 代表鎓阳离子。