[EN] NORBORNENE-TYPE POLYMERS, COMOSITIONS THEREOF AND LITHOGRAPHIC PROCESS USING SUCH COMPOSITIONS [FR] POLYMÈRES DE TYPE NORBORNÈNE, COMPOSITIONS LES COMPRENANT ET PROCÉDÉ LITHOGRAPHIQUE UTILISANT DE TELLES COMPOSITIONS
[EN] NORBORNENE-TYPE POLYMERS, COMOSITIONS THEREOF AND LITHOGRAPHIC PROCESS USING SUCH COMPOSITIONS<br/>[FR] POLYMÈRES DE TYPE NORBORNÈNE, COMPOSITIONS LES COMPRENANT ET PROCÉDÉ LITHOGRAPHIQUE UTILISANT DE TELLES COMPOSITIONS
申请人:PROMERUS LLC
公开号:WO2011127014A1
公开(公告)日:2011-10-13
Embodiments in accordance with the present invention provide for non-self imageable norbornene-type polymers useful for immersion lithographic processes, methods of making such polymers, compositions employing such polymers and immersion lithographic processes that make use of such compositions. More specifically the embodiments of the present invention are related to norbornene-type polymers useful for forming top-coat layers for overlying photoresist layers in immersion lithographic process and the process thereof.