申请人:Lei Xinjian
公开号:US08592606B2
公开(公告)日:2013-11-26
The present invention is related to a family of liquid group 4 precursors represented by the formula: (pyr*)M(OR1)(OR2)(OR3) wherein pyr* is an alkyl substituted pyrrolyl, wherein M is group 4 metals include Ti, Zr, and Hf; wherein R1-3 can be same or different and selected from group consisting of linear or branched C1-6 alkyls; preferably C1-3 alkyls; R4 is selected from the group consisting of C1-6 alkyls, preferably branched C3-5 alkyls substituted at 2, 5 positions to prevent the pyrrolyl coordinated to the metal center in η1 fashion; n=2, 3, 4. Most preferably the invention is directed to (2,5-di-tert-butylpyrrolyl)(tris(ethoxy)titanium, (2,5-di-tert-amylpyrrolyl)(tris(ethoxy)titanium, and (2,5-di-tert-amylpyrrolyl)(tris(iso-propoxy)titanium. The invention is also directed to (cyclopentadienyl)(2,5-di-methylpyrrolyl)(bis(ethoxy))titanium. Deposition methods using these compounds are also contemplated.
本发明涉及一类液态4族前体化合物,其化学式为:(pyr*)M(OR1)(OR2)(OR3),其中pyr*是一种取代烷基的吡咯烷基,M代表4族金属,包括钛、锆和铪;R1-3可以相同或不同,并从由线性或支链C1-6烷基组成的群体中选择;最好选择C1-3烷基;R4从由C1-6烷基组成的群体中选择,最好选择支链C3-5烷基,其在2,5位置被取代以防止吡咯烷基以η1方式配位到金属中心;n = 2、3、4。最好的实施例是(2,5-二叔丁基吡咯烷基)(三乙氧基钛)、(2,5-二叔戊基吡咯烷基)(三乙氧基钛)和(2,5-二叔戊基吡咯烷基)(三异丙氧基钛)。本发明还涉及(环戊二烯基)(2,5-二甲基吡咯烷基)(双乙氧基)钛。本发明还考虑了使用这些化合物的沉积方法。