tris(4-tert-butoxyphenyl)sulfonium trifluoromethanesulfonate

• 分子结构分类: 有机化合物 - 苯类化合物 - 苯酚醚
• 英文名称: tris(4-tert-butoxyphenyl)sulfonium trifluoromethanesulfonate
• 英文别名: tris(p-tert-butoxyphenyl)sulfonium trifluoromethanesulfonate；trifluoromethanesulfonate;tris[4-[(2-methylpropan-2-yl)oxy]phenyl]sulfanium
• 化学式: CF₃O₃S*C₃₀H₃₉O₃S
• 分子量: 628.774
• InChiKey: TUODWSVQODNTSU-UHFFFAOYSA-M

计算性质

• 辛醇/水分配系数(LogP)：
  8.37
• 重原子数：
  42
• 可旋转键数：
  9
• 环数：
  3.0
• sp3杂化的碳原子比例：
  0.42
• 拓扑面积：
  94.3
• 氢给体数：
  0
• 氢受体数：
  9

反应信息

• 作为产物：
  描述：

  三氟甲磺酸三甲基硅酯 、 对氯苯基叔丁基醚 在 氯化亚砜 、 ammonium chloride 、 magnesium 作用下， 以 四氢呋喃 、 氯仿 、 水 为溶剂， 以45%的产率得到tris(4-tert-butoxyphenyl)sulfonium trifluoromethanesulfonate
  参考文献：
  名称：

  Method for preparing triarylsulfonium salts

  摘要：

  通过将以下通式（1）的芳基格氏试剂与亚砜氯反应，然后将反应产物与以下通式（2）的三有机硅烷磺酸盐或三有机卤化物反应：（R.sup.6).sub.3 SiY其中R.sup.6可以相同或不同，是一价的碳氢基团，Y是取代或未取代的烷基磺酸盐、芳基磺酸盐或卤素原子，从而制备出以下通式（3）的三芳基磺鎓盐。 ##STR1## 在以上公式中，R.sup.1到R.sup.5每个可以相同或不同，是氢原子或一价有机基团，特别是烷基、芳基、烷氧基、芳氧基、双烷基氨基、双烷基氨基烷基、烷硫基或芳硫基基团，X是溴或氯原子。

  公开号：

  US05705702A1

文献信息

• ANTIREFLECTIVE COMPOSITIONS WITH THERMAL ACID GENERATORS
  申请人：Rohm and Haas Electronic Materials Korea Ltd.

  公开号：US20190085173A1

  公开（公告）日：2019-03-21

  New methods and substrates are provided that include antireflective compositions that comprise one or more thermal acid generators.

  提供了包括一个或多个热酸发生剂的防反射组分的新方法和基板。
• MONOMERS, POLYMERS AND PHOTORESIST COMPOSITIONS
  申请人：Rohm and Haas Electronic Materials Korea Ltd.

  公开号：US20180059545A1

  公开（公告）日：2018-03-01

  In one preferred embodiment, polymers are provided that comprise a structure of the following Formula (I): Photoresists that comprises such polymers also are provided.

  在一个首选实施例中，提供了包含以下化学式（I）结构的聚合物： 还提供了包含这种聚合物的光刻胶。
• COATING COMPOSITIONS SUITABLE FOR USE WITH AN OVERCOATED PHOTORESIST
  申请人：Amara John P.

  公开号：US20110003250A1

  公开（公告）日：2011-01-06

  In one aspect, organic coating compositions, particularly antireflective coating compositions, are provided that comprise that comprise a diene/dienophile reaction product. In another aspect, organic coating compositions, particularly antireflective coating compositions, are provided that comprise a component comprising a hydroxyl-naphthoic group, such as a 6-hydroxy-2-naphthoic group Preferred compositions of the invention are useful to reduce reflection of exposing radiation from a substrate back into an overcoated photoresist layer and/or function as a planarizing, conformal or via-fill layer.

  在一个方面，提供了有机涂层组合物，特别是抗反射涂层组合物，其包括二烯/二烯亲双反应产物。在另一个方面，提供了有机涂层组合物，特别是抗反射涂层组合物，其包括一个含有羟基-萘甲基团的组分，例如6-羟基-2-萘甲基团。本发明的优选组合物可用于减少曝光辐射从基板反射回覆盖的光刻胶层，并/或作为平坦化、整平或填孔层。
• COMPOUND, RESIN, MATERIAL FOR FORMING UNDERLAYER FILM FOR LITHOGRAPHY, UNDERLAYER FILM FOR LITHOGRAPHY, PATTERN FORMING METHOD, AND METHOD FOR PURIFYING THE COMPOUND OR RESIN
  申请人：Mitsubishi Gas Chemical Company, Inc.

  公开号：US20170073288A1

  公开（公告）日：2017-03-16

  The compound according to the present invention is represented by a specific formula. The compound according to the present invention has a structure according to the specific formula, and therefore can be applied to a wet process and is excellent in heat resistance and etching resistance. In addition, the compound according to the present invention has such a specific structure, and therefore has a high heat resistance, a relatively high carbon concentration, a relatively low oxygen concentration and also a high solvent solubility. Therefore, the compound according to the present invention can be used to form an underlayer film whose degradation is suppressed at high-temperature baking and which is also excellent in etching resistance to oxygen plasma etching or the like. Furthermore, the compound is also excellent in adhesiveness with a resist layer and therefore can form an excellent resist pattern.

  根据本发明，该化合物由特定的公式表示。根据本发明，该化合物具有特定公式的结构，因此可应用于湿法工艺，具有优异的耐热性和耐蚀性。此外，根据本发明，该化合物具有特定结构，因此具有高耐热性、相对较高的碳浓度、相对较低的氧浓度以及高溶剂溶解性。因此，根据本发明的化合物可用于形成在高温烘烤时降解受抑制且在氧等离子体蚀刻中具有优异耐蚀性的底层膜。此外，该化合物在与光阻层的粘附性方面也表现出色，因此可形成优异的光阻图案。
• Novel tertiary (meth)acrylates having lactone structure, polymers, resist compositions and patterning process
  申请人：Watanabe Takeru

  公开号：US20050250924A1

  公开（公告）日：2005-11-10

  Novel tertiary (meth)acrylate compounds having a lactone structure are polymerizable into polymers having improved transparency, especially at the exposure wavelength of an excimer laser and dry etching resistance. Resist compositions comprising the polymers are sensitive to high-energy radiation, have a high resolution, and lend themselves to micropatterning with electron beams or deep-UV rays.

  新型含有内酯结构的三元（甲基）丙烯酸酯化合物可聚合成具有改善透明度的聚合物，特别是在准分子激光的照射波长下以及干法刻蚀抗性方面。包括这些聚合物的抗蚀组合物对高能辐射敏感，具有高分辨率，并适用于电子束或深紫外线微图案化。