A positive photosensitive composition comprises a compound capable of generating a specified sulfonic acid upon irradiation with one of an actinic ray and radiation and (B) a resin capable of decomposing under the action of an acid to increase the solubility in an alkali developer.
There is formed a laminated resist which exhibits sufficient reflection reducing effect in a photolithography process using light of vacuum ultraviolet region and also has sufficient developing characteristics in a developing process. The method of forming the laminated photoresist comprises (I) a step for forming the photoresist layer (L1) on a substrate and (II) a step for forming the antireflection layer (L2) on the photoresist layer (L1) by applying the coating composition containing the fluorine-containing polymer (A) having hydrophilic group Y. The fluorine-containing polymer (A) contains a structural unit derived from a fluorine-containing ethylenic monomer having hydrophilic group Y and is characterized in that (i) the hydrophilic group Y contains an acidic OH group having a pKa value of not more than 11, (ii) a fluorine content is not less than 50 % by mass, and (iii) the number of moles of the hydrophilic group Y in 100 g of the fluorine-containing polymer (A) is not less than 0.14.
形成了一种层状光刻胶,它在使用真空紫外区光的光刻工艺中显示出足够的减反射效果,并且在显影工艺中具有足够的显影特性。形成层状光刻胶的方法包括:(I) 在基底上形成光刻胶层 (L1) 的步骤;(II) 在光刻胶层 (L1) 上形成抗反射层 (L2) 的步骤,该步骤通过涂敷含有亲水基团 Y 的含氟聚合物 (A) 的涂层组合物来实现。含氟聚合物(A)含有由具有亲水基团 Y 的含氟乙烯单体衍生的结构单元,其特征在于:(i) 亲水基团 Y 含有 pKa 值不大于 11 的酸性 OH 基团;(ii) 氟含量不小于 50%(按质量计);(iii) 100 克含氟聚合物(A)中亲水基团 Y 的摩尔数不小于 0.14。
PEROXIDE-CURABLE FLUOROELASTOMER COMPOSITION
申请人:DAIKIN INDUSTRIES, LTD.
公开号:EP1865025A1
公开(公告)日:2007-12-12
The present invention provides a peroxide-vulcanizable fluorine-containing elastomer composition which is remarkably improved in fluidity and thereby exhibits improved processability, though conventional fluorine-containing elastomer compositions could be molded only by a molding process having a problem in its productivity, for instance, compression molding or transfer molding which has been used so far as a general molding process. The present invention further provides a molded article obtained by vulcanizing the composition. The present invention also provides a fluorine-containing elastomer composition in which a large amount of a filler can be blended. Specifically, the present invention relates to the fluorine-containing elastomer composition comprising a fluorine-containing elastomer (A) composed of a structural unit derived from vinylidene fluoride and/ or a structural unit of tetrafluoroethylene and a structural unit derived from at least one other monomer, and having (a) a number average molecular weight (Mn) of 30,000 to 70,000 g/mol, and (b) an iodine content of 0.3 to 1.0 % by weight and an organoperoxide vulcanizing agent (B).
The present invention provides a fluorine-containing elastomer composition of which viscosity can be decreased without increasing an amount of expensive monomer while maintaining physical properties in normal state of a branched fluorine-containing elastomer. The composition is a peroxide-crosslinkable fluorine-containing elastomer composition comprising (A) a branched fluorine-containing elastomer having peroxide-crosslinkable cure site, which has a number average molecular weight of from 1,000 to 300,000 and a Mark-Houwink gradient "a" of less than 0.6 when an absolute weight molecular weight and an intrinsic viscosity are plotted on a Mark-Houwink plot having an axis of abscissa of absolute weight molecular weight and an axis of ordinate of intrinsic viscosity, and (B) a straight chain type fluorine-containing polymer having a number average molecular weight of from 1,000 to 250,000 and a Mark-Houwink gradient "a" of not less than 0.6.
There is formed a laminated resist which exhibits sufficient reflection reducing effect in a photolithography process using light of vacuum ultraviolet region and also has sufficient developing characteristics in a developing process. The method of forming the laminated photoresist comprises (I) a step for forming the photoresist layer (L
1
) on a substrate and (II) a step for forming the antireflection layer (L
2
) on the photoresist layer (L
1
) by applying the coating composition containing the fluorine-containing polymer (A) having hydrophilic group Y. The fluorine-containing polymer (A) contains a structural unit derived from a fluorine-containing ethylenic monomer having hydrophilic group Y and is characterized in that (i) the hydrophilic group Y contains an acidic OH group having a pKa value of not more than 11, (ii) a fluorine content is not less than 50% by mass, and (iii) the number of moles of the hydrophilic group Y in 100 g of the fluorine-containing polymer (A) is not less than 0.14.