Quaternaryammoniumsalts were synthesized from ammoniumsalts and dialkyl carbonates over imidazolium ionic liquid catalysts. The reaction gave almost stoichiometric amounts of the quaternaryammoniumsalts for halides and nitrates. It was found that the electron-donating property of the alkyl moieties of ammonium cations, the electrophilic nature of the alkyl group of the carbonate, the acidity of
CoMoW sulfide nanocatalysts for the HDS of DBT from novel ammonium and alkyltrimethylammonium-thiomolybdate-thiotungstate-cobaltate (II) precursors
作者:Y. Espinoza-Armenta、J. Cruz-Reyes、F. Paraguay-Delgado、M. Del Valle、G. Alonso、S. Fuentes、R. Romero-Rivera
DOI:10.1016/j.apcata.2014.08.017
日期:2014.9
Five unsupported, highly active CoMoW trimetallic nanocatalysts were obtained by in situ decomposition from five novel precursors: (NH4)(2)[Co(MoS4)(WS4)] and (RN(CH3)(3))(2)[(MoS4)(WS4)] (where R = dodecyl, tetradecyl, cetyl and octadecyl), during the HDS of DBT. The catalyst labeled CoMoWS-C14, derived from the precursor containing the tetradecyl group, exhibits the highest catalytic activity (k = 421 x 10(-7) mol/g s). N-2 adsorption-desorption shows that the CoMoW catalysts are mesoporous materials with characteristic Type IV isotherms, having surface areas of 11-340 m(2)/g. Elemental analysis by X-ray energy dispersive spectroscopy (EDS) working at STEM mode finds high concentrations of carbon (3.7 <= C/Mo <= 11.3 and 2.7 <= C/W <= 9) in all the catalysts except CoMoWS, where carbon was not detected. The XRD patterns show that the catalysts are highly dispersed (less so for the CoMoWS) given the absence of the (0 0 2) reflection, along with broad and low intensity (1 0 1) and (1 1 0) reflections. High dispersion is also supported by the STEM micrographs showing unstacked layers. The selectivity of the reaction for all catalysts favors the direct desulfurization pathway. The surface area and high catalytic activity do not show direct correlation with the length of the hydrocarbon chains of the precursors. (C) 2014 Elsevier B.V. All rights reserved.
JPH1160289A
申请人:——
公开号:JPH1160289A
公开(公告)日:1999-03-02
POLISHING LIQUID
申请人:KAMIMURA Tetsuya
公开号:US20080203354A1
公开(公告)日:2008-08-28
The invention provides a polishing liquid for polishing a barrier layer of a semiconductor integrated circuit, the polishing liquid comprising: a diquaternary ammonium cation; a corrosion inhibiting agent; and a colloidal silica, wherein the pH of the polishing liquid is in the range of 2.5 to 5.0. According to the invention, a polishing liquid capable of achieving a superior barrier layer polishing rate, as well as suppressing the occurrence of scratching due to the agglomeration of solid abrasive grains can be provided.
POLISHING LIQUID AND POLISHING METHOD USING THE SAME
申请人:KAMIMURA Tetsuya
公开号:US20090004863A1
公开(公告)日:2009-01-01
The present invention provides a polishing liquid for polishing a ruthenium-containing barrier layer, the polishing liquid being used in chemical mechanical polishing for a semi-conductor device having a ruthenium-containing barrier layer and conductive metal wiring lines on a surface thereof, the polishing liquid comprising an oxidizing agent; and a polishing particulate having hardness of 5 or higher on the Mohs scale and having a composition in which a main component is other than silicon dioxide (SiO
2
). The present invention also provides a polishing method for chemical mechanical polishing of a semi-conductor device, the method contacting the polishing liquid with the surface of a substrate to be polished, and polishing the surface to be polished such that contacting pressure from a polishing pad to the surface to be polished is from 0.69 kPa to 20.68 kPa.