A composition for pattern formation includes a first polymer, a second polymer and a solvent. The first polymer includes: a first block including a first structural unit derived from a substituted or unsubstituted styrene; and a second block including a second structural unit other than the first structural unit. The second polymer includes: the first structural unit; and a group bonding to at least one end of a main chain thereof and including a polar group. The polar group is preferably a hydroxy group or a carboxyl group. A number average molecular weight of the second polymer is preferably no greater than 6,000. A mass ratio of the second polymer to the first polymer is preferably no less than 0.15 and no greater than 0.4. The solvent preferably comprises a compound comprising a hydroxyl group and an alkyl ester group.
一种用于图案形成的组合物包括第一聚合物、第二聚合物和溶剂。第一种聚合物包括:第一嵌段,其中包括源自取代或未取代
苯乙烯的第一结构单元;以及第二嵌段,其中包括与第一结构单元不同的第二结构单元。第二种聚合物包括:第一种结构单元;以及与主链至少一端结合并包括极性基团的基团。极性基团最好是羟基或羧基。第二种聚合物的平均分子量最好不大于 6000。第二种聚合物与第一种聚合物的质量比最好不小于 0.15 也不大于 0.4。溶剂最好由包含羟基和烷基酯基的化合物组成。