申请人:Shin-Etsu Chemical Co., Ltd.
公开号:US20160320698A1
公开(公告)日:2016-11-03
An onium salt having an anion moiety of a specific structure is an effective photoacid generator. A resist composition comprising the onium salt has the advantages of compatibility and reduced acid diffusion and forms a pattern with a good balance of sensitivity and MEF, rectangularity, and minimal defects.
具有特定结构的阴离子基团的醇盐是一种有效的光酸发生剂。包含该醇盐的抗蚀组合物具有兼容性和减少酸扩散的优点,并形成具有良好灵敏度和MEF、矩形度以及最小缺陷的图案。