A resist composition including a base component (A) which exhibits changed solubility in a developing solution under action of acid, a nitrogen-containing organic compound (C) containing a compound (C1) represented by general formula (c1) shown below and an acid-generator component (B) which generates acid upon exposure (excluding the compound (C1)) (R
1
represents an alicyclic group of 5 or more carbon atoms which may have a substituent; X represents a divalent linking group; Y represents a linear, branched or cyclic alkylene group or an arylene group; Rf represents a hydrocarbon group containing a fluorine atom; and M
+
represents an organic cation).
一种电阻剂组合物,包括一种基础组分(A),在酸的作用下在显影溶液中表现出改变的溶解度,一种含有一种通式(c1)所示的化合物(C1)的含氮有机化合物(C),以及一种酸发生剂组分(B),在暴露后产生酸(不包括化合物(C1))(其中,R1表示具有5个或更多碳原子的脂环族基团,可以具有取代基;X表示双价连接基团;Y表示线性、支链或环状烷基或芳基;Rf表示含有
氟原子的碳氢基团;M+表示有机阳离子)。