A pattern-forming method includes: forming a pattern on an upper face side of a substrate; applying a first composition to a sidewall of the pattern; forming a resin layer by applying a second composition to an inner face side of the sidewall of the pattern coated with the first composition; allowing the resin layer to separate into a plurality of phases; and removing at least one of the plurality of phases. The first composition contains a first polymer. The second composition contains a second polymer. The second polymer includes a first block having a first structural unit and a second block having a second structural unit. The polarity of the second structural unit is higher than the polarity of the first structural unit. Immediately before forming of the resin layer, a static contact angle θ (°) of water on the sidewall of the pattern satisfies inequality (1).
α
≥
θ
≥
α
+
β
2
(
1
)
一种图案形成方法包括:在基板的上端面形成图案;在图案的侧壁上涂敷第一种组合物;通过在涂有第一种组合物的图案侧壁的内端面涂敷第二种组合物形成
树脂层;使
树脂层分离成多个相;以及去除多个相中的至少一个。第一种组合物含有第一种聚合物。第二种组合物含有第二种聚合物。第二种聚合物包括具有第一结构单元的第一嵌段和具有第二结构单元的第二嵌段。第二结构单元的极性高于第一结构单元的极性。在形成
树脂层之前,
水在图案侧壁上的静态接触角 θ (°) 满足不等式 (1)。
α
≥
θ
≥
α
+
β
2
(
1
)