申请人:MITSUBISHI GAS CHEMICAL COMPANY, INC.
公开号:EP2662727A2
公开(公告)日:2013-11-13
A radiation-sensitive composition containing 1 to 80% by weight of a solid component and 20 to 99% by weight of a solvent. The solid component contains a compound B which has (a) a structure derived from a polyphenol compound A by introducing an acid-dissociating group to at least one phenolic hydroxyl group of the polyphenol compound A which is synthesized by a condensation between a compound selected from the group consisting of compounds such as for instance diformylbenzene, diacetylbenzene and diformyltoluene; or a di- to tetrafunctional aromatic ketone or aromatic aldehyde each having 12 to 36 carbon atoms with a compound having 1 to 3 phenolic hydroxyl groups and 6 to 15 carbon atoms, and (b) a molecular weight of 400 to 2000. The composition containing the compound B is useful as an acid-amplified, non-polymeric resist material, because it is highly sensitive to radiation such as KrF excimer lasers, extreme ultraviolet rays, electron beams, and X-rays, and provides resist patterns with a high resolution, high heat resistance, and high etching resistance.
一种辐射敏感组合物,含有 1%至 80%(按重量计)的固体成分和 20%至 99%(按重量计)的溶剂。固体成分含有一种化合物 B,该化合物 B 具有 (a) 由多酚类化合物 A 衍生出的结构,该结构是通过在多酚类化合物 A 的至少一个酚羟基上引入酸解离基团而形成的,该多酚类化合物 A 是由选自以下组成的化合物组的化合物缩合合成的:例如二甲酰基苯、二乙酰基苯和二甲酰基甲苯;(b) 分子量为 400 至 2000。含有化合物 B 的组合物可用作酸放大的非聚合抗蚀剂材料,因为它对诸如 KrF 准分子激光、极紫外线、电子束和 X 射线等辐射高度敏感,并能提供具有高分辨率、高耐热性和高抗蚀性的抗蚀图案。