在Na 2 CO 3,K 2 CO 3,CaCO 3,BaCO 3和ZnO上热解二甲基全氟2,7-二甲基-3,6-二氧杂-1,8-辛二酸酯(1),得到含全氟-3的混合物1,6-二氧杂-1,7-辛二烯(2)和全氟-2-甲基-3,6-二氧杂辛酸酯-7-烯(3)。为了获得这些乙烯基醚所必需的热解条件,对于二价金属化合物而言,其温度要比对一价金属化合物更高。热解温度和分解时间的增加导致转化率增加1。在较低温度下,热解产物主要为3。但是,2的形成随着分解温度的升高而增加。在Na 2 CO 3,K 2 CO 3上1的热解分解产物中发现碳酸二甲酯。
Sulfonyl-containing fluorocarbon vinyl ethers and ion exchange membrane formed therefrom
申请人:E. I. DU PONT DE NEMOURS AND COMPANY
公开号:US03882093A1
公开(公告)日:1975-05-06
Sulfonyl-containing fluorocarbon vinyl ethers are disclosed of the formula WHEREIN M IS AN INTEGER FROM 2 TO 5 AND N IS AN INTEGER FROM 2 TO 10.
含砜基的氟碳乙烯醚的化学式为M为2至5的整数,N为2至10的整数。
Fluorine-containing unsaturated compound and method for its production
申请人:Furukawa Yutaka
公开号:US20050113609A1
公开(公告)日:2005-05-26
A novel fluorine-containing unsaturated compound and a method for its production.
A fluorine-containing unsaturated compound represented by R
1
CY
1
HCY
2
Y
3
OQ
1
CH═CH
2
or CH
2
═CHQ
2
OCZ
1
Z
2
CZ
3
HR
2
CZ
4
HCZ
5
Z
6
OQ
2
CH═CH
2
(wherein R
1
is a monovalent fluorine containing organic group, etc., R
2
is a bivalent fluorine containing organic group, etc., Y
1
to Y
3
and Z
1
to Z
6
are fluorine atoms, and Q
1
and Q
2
are alkylene groups, etc.). A method for producing a fluorine-containing unsaturated compound having a group represented by —CX
1
HCX
2
X
3
OQCH═CH
2
(wherein X
1
to X
3
are fluorine atoms, and Q is an alkylene group, etc.), which comprises reacting a compound having —CX
1
═CX
2
X
3
with HOQCH═CH
2
in the presence of an alkali metal compound.
A dry etching gas comprising a C
4-6
fluorine compound which has an ether bond or carbonyl group and one or more fluorine atoms in the molecule and is constituted only of carbon, fluorine, and oxygen atoms and in which the ratio of the number of fluorine atoms to the number of carbon atoms (F/C) is 1.9 or lower (provided that the compound is neither a fluorine compound having one cyclic ether bond and one carbon-carbon double bond nor a saturated fluorine compound having one carbonyl group); a mixed dry etching gas comprising the dry etching gas and at least one gas selected from the group consisting of rare gases, O
2
, O
3
, CO, CO
2
, CHF
3
, CH
2
F
2
, CF
4
, C
2
F
6
, and C
3
F
8
; and a method of dry etching which comprises converting either of these dry etching gases into a plasma and processing a semiconductor material with the plasma. The dry etching gases can be safely used, are reduced in influence on the global environment, and can highly selectively dry-etch a semiconductor material at a high dry etching rate to form a satisfactory pattern shape. The dry etching method employs either of these dry etching gases.
申请人:National Institute of Advanced Industrial Science
and Technology
公开号:EP1760769A1
公开(公告)日:2007-03-07
A dry etching gas comprising a C4-6 fluorine compound which has an ether bond or carbonyl group and one or more fluorine atoms in the molecule and is constituted only of carbon, fluorine, and oxygen atoms and in which the ratio of the number of fluorine atoms to the number of carbon atoms (F/C) is 1.9 or lower (provided that the compound is neither a fluorine compound having one cyclic ether bond and one carbon-carbon double bond nor a saturated fluorine compound having one carbonyl group); a mixed dry etching gas comprising the dry etching gas and at least one gas selected from the group consisting of rare gases, O2, O3, CO, CO2, CHF3, CH2F2, CF4, C2F6, and C3F8; and a method of dry etching which comprises converting either of these dry etching gases into a plasma and processing a semiconductor material with the plasma. The dry etching gases can be safely used, are reduced in influence on the global environment, and can highly selectively dry-etch a semiconductor material at a high dry etching rate to form a satisfactory pattern shape. The dry etching method employs either of these dry etching gases.