Disclosed are a photoacid generator, a copolymer, a chemically amplified resist composition, and a method of forming a pattern using the chemically amplified resist composition. The photoacid is connected with a main chain of the copolymer, whereby the photoacid is equally dispersed within a resist layer, and characteristics of line edge roughness of a resist pattern is improved.
本发明涉及一种光酸发生剂、一种共聚物、一种
化学放大型光刻胶组合物以及使用该
化学放大型光刻胶组合物形成图案的方法。光酸发生剂与共聚物的主链相连接,从而使光酸发生剂在光刻胶层内均匀分散,并改善光刻胶图案线边粗糙度的特性。