Polymers and co-polymers having monomeric units formed by the polymerization of monomers of the Structure I
where R
1
is a moiety containing an ethylenically unsaturated polymerizable group, R
2
is a C
1
-C
3
alkylene group, and R
3
is a C
1-10
linear or cyclic alkyl group, a C
6-10
aromatic or substituted aromatic group, a C
1-8
alkoxy methyl, or a C
1-8
alkoxy ethyl group, are useful as binder resins for photosensitive compositions, and processes for photolithography in the production of semiconductor devices and materials.
Polymers and co-polymers having monomeric units formed by the polymerization of monomers of the Structure I
where R
1
is a moiety containing an ethylenically unsaturated polymerizable group, R
2
is a C
1
-C
3
alkylene group, and R
3
is a C
1-10
linear or cyclic alkyl group, a C
6-10
aromatic or substituted aromatic group, a C
1-8
alkoxy methyl, or a C
1-8
alkoxy ethyl group, are useful as binder resins for photosensitive compositions, and processes for photolithography in the production of semiconductor devices and materials.
Andrianov,K.A. et al., Journal of general chemistry of the USSR, 1978, vol. 48, p. 2042 - 2046
作者:Andrianov,K.A. et al.
DOI:——
日期:——
ANDRIANOV K. A.; ZHDANOV A. A.; KASHUTINA EH. A.; SHCHEGOLIXINA O. I., ZH. OBSHCH. XIMII, 1978, 48, HO 10, 2248-2253
作者:ANDRIANOV K. A.、 ZHDANOV A. A.、 KASHUTINA EH. A.、 SHCHEGOLIXINA O. I.
DOI:——
日期:——
Aliphatic Organo-functional Siloxanes. IV. Direct Synthesis of Organosiloxane Esters and Acids from Halomethylsiloxanes and Halomethylethoxysilanes<sup>1</sup>
作者:L. H. Sommer、J. M. Masterson、O. W. Steward、R. H. Leitheiser