A photosensitive composition comprising a compound capable of generating a specific sulfonic acid upon irradiation with actinic rays or a radiation; a compound capable of generating a specific sulfonic acid upon irradiation with an actinic ray or a radiation; and a pattern forming method using a photosensitive composition comprising a compound capable of generating a specific sulfonic acid upon irradiation with an actinic ray or a radiation.
一种包含能够在受到光敏辐射或辐射照射后生成特定
磺酸的化合物的光敏组合物;一种包含能够在受到光敏辐射或辐射照射后生成特定
磺酸的化合物的光敏组合物;以及一种使用包含能够在受到光敏辐射或辐射照射后生成特定
磺酸的化合物的光敏组合物的图案形成方法。