The synthesis of polyfluorinated enol acetates has been performed by reductive dechlorination of chloropolyfluoroketones with zinc in Ac2O. Under these conditions, hexafluoroacetone is preferably reduced at the carbonyl group.
The synthesis of polyfluorinated enol acetates has been performed by reductive dechlorination of chloropolyfluoroketones with zinc in Ac2O. Under these conditions, hexafluoroacetone is preferably reduced at the carbonyl group.
Vacuum-UV influenced design of polymers and dissolution inhibitors for next generation photolithography
作者:Brian C. Trinque、Charles R. Chambers、Brian P. Osborn、Ryan P. Callahan、Geun Su Lee、Shiro Kusumoto、Daniel P. Sanders、Robert H. Grubbs、Willard E. Conley、C.Grant Willson
DOI:10.1016/s0022-1139(03)00076-9
日期:2003.7
An overview of our 157 nm photoresist development activities is presented. Examination of the vacuum ultraviolet (VUV) absorbances of fluorinated monomers and polymers has provided knowledge that influenced copolymer design so that resist transparency in the vacuum-UV can be maximized. Partially fluorinated norbornenes and tricyclononenes (TCNs) have been incorporated into copolymers using metal-catalyzed addition and radical initiators. These materials have orders of magnitude higher transparency at 157 nm compared to their hydrocarbon analogues as measured by variable angle spectroscopic ellipsometry (VASE). We have also synthesized fluorinated dissolution inhibitors for use in a three-component resist system. The results of preliminary lithographic evaluations of resists formulated from these polymers are presented. (C) 2003 Elsevier Science B.V. All rights reserved.
Bekker,R.A. et al., Journal of Organic Chemistry USSR (English Translation), 1975, vol. 11, p. 1584 - 1587
作者:Bekker,R.A. et al.
DOI:——
日期:——
Bekker,R.A. et al., Journal of Organic Chemistry USSR (English Translation), 1976, vol. 12, p. 1371 - 1375
作者:Bekker,R.A. et al.
DOI:——
日期:——
Polyfluorinated enol acetates
作者:Yu. V. Zeifiman、S. A. Postovoi、L. S. German
DOI:10.1007/bf00699163
日期:1994.1
The synthesis of polyfluorinated enol acetates has been performed by reductive dechlorination of chloropolyfluoroketones with zinc in Ac2O. Under these conditions, hexafluoroacetone is preferably reduced at the carbonyl group.