[EN] MEASUREMENT OF ETCHING MOLECULE LEVEL IN ETCHING COMPOSITION<br/>[FR] MESURE DE NIVEAU DE MOLÉCULE DE GRAVURE DANS UNE COMPOSITION DE GRAVURE
申请人:ECOLAB USA INC
公开号:WO2016099660A1
公开(公告)日:2016-06-23
A method for identifying the amount of hydrofluoric acid in a buffered oxide etching composition. In buffered oxide etching compositions it is very difficult to measure the amount of hydrofluoric acid because it has varying equilibriums and it is toxic so it hard to handle and sample. When used to manufacture microchips however, incorrect amounts of hydrofluoric acid will ruin those chips. The invention utilizes a unique method of spectrographically measuring the hydrofluoric acid when in contact with added chro mo genie agents to obtain exact measurements that are accurate, immediate, and safe.