A photosensitive transfer material including a support and a photosensitive resin composition layer, in which the photosensitive resin composition layer includes a polymer component (A) including a polymer having a constituent unit (a1) that includes a group in which an acid group is protected by an acid-decomposable group and a photoacid generator (B), and the photosensitive resin composition layer does not have an ethylenic crosslinking structure is a positive-type material, is excellent in terms of heat-resistant rectangular properties, etchant resistance, and resist peeling properties, and generates only a small amount of dust during processes; a pattern formation method, and an etching method.
一种光敏转印材料,包括支撑体和光敏
树脂组成层,其中光敏
树脂组成层包括聚合物成分(A),聚合物成分包括具有组成单元(a1)的聚合物,组成单元(a1)包括酸基被酸可分解基团和光酸发生器(B)保护的基团,光敏
树脂组成层不具有
乙烯交联结构,是一种正型材料,在耐热矩形性能、耐蚀刻剂性能和抗剥离性能方面非常出色,并且在加工过程中仅产生少量粉尘;图案形成方法和蚀刻方法。