Provided are a photocurable composition for imprints, having good releasability and temporal stability of the releasability, a pattern forming method, and a method for manufacturing a device. This photocurable composition for imprints includes a monofunctional chained aliphatic (meth)acrylate (A1) not containing a fluorine atom, a bifunctional or higher polyfunctional (meth)acrylate (A2) not containing a fluorine atom, a monofunctional (meth)acrylate (B) containing a fluorine atom, a photopolymerization initiator (C), and a non-polymerizable compound (D) having a polyoxyalkylene structure in a proportion of 1% to 5% by mass, in which the monofunctional chained aliphatic (meth)acrylate (A1) not containing a fluorine atom has a boiling point of 100° C. to 200° C. at a pressure of 0.67 kPa, and the monofunctional (meth)acrylate (B) containing a fluorine atom has a boiling point of 100° C. to 200° C. at a pressure of 0.67 kPa.
本文提供了一种光固化印模组合物、一种图案形成方法和一种设备制造方法,该组合物具有良好的释放性和释放性的时间稳定性。这种用于印模的光固化组合物包括不含
氟原子的单官能团链状脂肪族(甲基)
丙烯酸酯(A1)、不含
氟原子的双官能团或更高官能团(甲基)
丙烯酸酯(A2)、含
氟原子的单官能团(甲基)
丙烯酸酯(B)、一种光聚合
引发剂 (C) 和一种具有聚氧亚烷基结构的不可聚合化合物 (D),其质量比例为 1%至 5%,其中不含
氟原子的单官能链脂肪族 (甲基)
丙烯酸酯 (A1) 的沸点为 100°C 至 200°C。在 0.67 千帕的压力下,沸点为 100 摄氏度至 200 摄氏度,而含
氟原子的单官能团 (甲基)
丙烯酸酯(B)在 0.67 千帕的压力下,沸点为 100 摄氏度至 200 摄氏度。