申请人:RIKEN
公开号:US20030194621A1
公开(公告)日:2003-10-16
A photosensitive resin composition comprising an oxygen sensitizer and a polyamic acid or a polyimide which has substituents having a cis-diene structure at the side chains; a printed wiring board, a substrate for disposing semiconductor chips and a semiconductor device prepared by coating the substrate with the composition and forming fine patterns by exposure of irradiation; and processes for producing a printed wiring board, a substrate for disposing semiconductor chips and a semiconductor device which comprise coating the substrate with the composition and forming fine patterns by crosslinking the cis-diene group by polycondensation with oxidation with the singlet oxygen generated by exposure of irradiation to the oxygen sensitizer in the presence of oxygen.
The photosensitive resin composition of the negative type exhibits high sensitivity and high resolution, can form a resin layer having excellent heat resistance and can be applied to production of semiconductor devices and circuit wiring boards. The printed wiring board, the substrate for disposing semiconductor chips and the semiconductor device can be obtained by using the composition. The processes provide the printed wiring board, the substrate for disposing semiconductor chips and the semiconductor device.
一种光敏树脂组合物,包括氧敏感剂和具有侧链上具有顺式二烯结构的取代基的聚酰胺酸或聚酰亚胺;一种印刷电路板、用于放置半导体芯片的基板和通过涂覆基板并通过暴露辐射形成细微图案制备的半导体器件;以及制备印刷电路板、用于放置半导体芯片的基板和半导体器件的过程,其中涂覆基板与组合物并通过与氧气敏感剂在氧气存在下通过聚合缩合反应交联顺式二烯基团与暴露辐射产生的单线态氧氧化形成细微图案。负型光敏树脂组合物具有高灵敏度和高分辨率,可以形成具有优异耐热性的树脂层,并可应用于半导体器件和电路布线板的生产。可以使用该组合物获得印刷电路板、用于放置半导体芯片的基板和半导体器件。该过程提供了印刷电路板、用于放置半导体芯片的基板和半导体器件。