申请人:International Business Machines Corporation
公开号:US06074800A1
公开(公告)日:2000-06-13
Several mid UV photo acid generators (PAGs), a chemically amplified photo resist (CAMP), and method for improving nested to isolated line bias are provided. Similarly, photo speed may also be improved. Unlike conventional mid UV PAGs, the present invention's PAG compounds, resist composition, and method do not require a mid UV sensitizer. Specifically, PAGs are provided that bear a chromophore capable of receiving mid UV radiation, particularly I-line, and that are suitable for use in a chemically amplified photo resist having a photo speed of 500 mJ/cm.sup.2 or less, but preferrably 200 mJ/cm.sup.2 or less. For example, the PAGs can be a sulfonium or iodonium salt, such as anthryl, butyl, methyl sulfonium triflate and bis(4-t-butylphenyl)iodonium 9,10-dimethoxyanthracene sulfonate. The chromophore forming a part of the PAGs can be selected from polyaromatic hydrocarbons, for example, chrysenes, pyrenes, fluoranthenes, anthrones, benzophenones, thioxanthones, anthracenes, and phenanthrenes, but preferably anthracenes.
本发明提供了几种中波紫外光酸发生剂(PAGs)、化学增感光刻胶(CAMP)和改善嵌套到孤立线偏差的方法。同样,光速也可以得到改善。与传统的中波紫外PAG不同,本发明的PAG化合物、光刻胶组合物和方法不需要中波紫外敏化剂。具体而言,提供了一种PAG,其具有能够接收中波紫外辐射,特别是I线的色团,并适用于具有500 mJ/cm.sup.2或更低光速的化学增感光刻胶,但最好是200 mJ/cm.sup.2或更低。例如,PAGs可以是磺酸盐或碘酸盐,例如蒽基、丁基、甲基磺酸盐三氟甲烷基和双(4-t-叔丁基苯基)碘酸锂9,10-二甲氧基蒽磺酸盐。PAGs的色团可以选择聚芳香烃,例如花菁、芘、氟芴、蒽酮、苯并酮、噻吩酮、蒽和菲,但最好是蒽。