A radiation-sensitive composition comprising a resist base material (A), an optically active diazonaphthoquinone compound (B), and a solvent (C), wherein the content of the solvent (C) in the composition is 20 to 99% by mass, the content of components except for the solvent (C) is 1 to 80% by mass, and the resist base material (A) is a compound represented by the following formula (1):
wherein R1 is a 2n-valent group of 1 to 30 carbon atoms; R2 to R5 are each independently an alkyl group of 1 to 10 carbon atoms, an aryl group of 6 to 10 carbon atoms, an alkenyl group of 2 to 10 carbon atoms, an alkoxy group of 1 to 30 carbon atoms, a halogen atom, a thiol group, or a hydroxyl group, wherein at least one of R4 and/or at least one of R5 is one or more kinds selected from a hydroxyl group and a thiol group; m2 and m3 are each independently an integer of 0 to 8; m4 and m5 are each independently an integer of 0 to 9, wherein m4 and m5 are not 0 at the same time; n is an integer of 1 to 4; and p2 to p5 are each independently an integer of 0 to 2.
一种辐射敏感性组合物,由抗蚀剂基材(A)、光学活性重氮
萘醌化合物(B)和溶剂(C)组成,其中溶剂(C)在组合物中的含量为 20% 至 99%(按质量计),除溶剂(C)以外的其他成分的含量为 1% 至 80%(按质量计),抗蚀剂基材(A)是由下式(1)表示的化合物:
其中 R1 是 1 至 30 个碳原子的 2n 价基团;R2 至 R5 各自独立地是 1 至 10 个碳原子的烷基、6 至 10 个碳原子的芳基、2 至 10 个碳原子的烯基、1 至 30 个碳原子的烷氧基、卤素原子、
硫醇基团或羟基,其中 R4 和/或 R5 中的至少一个是选自羟基和
硫醇基团的一种或多种;m2和m3各自独立地为0至8的整数;m4和m5各自独立地为0至9的整数,其中m4和m5不同时为0;n为1至4的整数;以及p2至p5各自独立地为0至2的整数。